Method for producing a nanocrystalline, gas-sensitive layer structure, corresponding nanocrystalline, gas-sensitive layer structure, and gas sensor with a corresponding nanocrystalline, gas-sensitive layer structure

摘要

The present invention provides a method for producing a nanocrystalline, gas-sensitive layer structure, a corresponding nanocrystalline, gas-sensitive layer structure, and a gas sensor with a corresponding nanocrystalline, gas-sensitive layer structure. The method for producing a nanocrystalline, gas-sensitive layer structure (201) on a substrate (101) comprises the steps of depositing a base layer (102) from a base material, depositing a doping layer (103) from a doping material, repeating the preceding steps, and performing a Temperschritts, whereby a gas-sensitive, nanocrystalline layer structure (200) is produced.