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RADICALLY CURABLE COMPOUND, METHOD FOR PRODUCING RADICALLY CURABLE COMPOUND, RADICALLY CURABLE COMPOSITION, CURED PRODUCT THEREOF, AND COMPOSITION FOR RESIST MATERIAL
RADICALLY CURABLE COMPOUND, METHOD FOR PRODUCING RADICALLY CURABLE COMPOUND, RADICALLY CURABLE COMPOSITION, CURED PRODUCT THEREOF, AND COMPOSITION FOR RESIST MATERIAL
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机译:自由基固化性化合物,自由基固化性化合物的制造方法,自由基固化性组合物,其固化物及其构成材料
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摘要
Provided is a positive photoresist composition excellent in terms of heat resistance. A radically curable compound is represented by a general formula (1) below (where R 1 , R 2 , and R 3 each independently represent an alkyl group having 1 to 8 carbon atoms; m and n each independently represent an integer of 1 to 4; p represents an integer of 0 to 4; X, Y, and Z each independently represent an acryloyloxy group, a methacryloyloxy group, or a hydroxy group, and at least one of X, Y, and Z represents an acryloyloxy group or a methacryloyloxy group; and t represents 1 or 2).
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