COATING DEVICE AND COATING METHOD FOR TUBE-TYPE PERC SOLAR CELLS

摘要

A coating device for a tube-type PERC solar cell comprises a wafer loading area (1), a furnace body (2), a gas cabinet (3), a vacuum system (4), a heating system (7), a control system (5) and a graphite boat (6), wherein the gas cabinet (3) is provided with a first gas line for feeding silane, a second gas line for feeding ammonia, a third gas line for feeding trimethylaluminum, a fourth gas line for feeding nitrous oxide and a fifth gas line for feeding methane. The graphite boat (6) is employed for loading and unloading a silicon wafer. Pre-processing is performed to the graphite boat (6) before use or after several coating, wherein the pre-processing includes: baking the graphite boat (6) and coating at least one layer of silicon carbide film on a surface of the baked graphite boat (6). The present application also discloses a coating method for a tube-type PERC solar cell. Such method simplifies the pre-processing steps of the graphite boat, reduces consumption of silicon wafers, avoids scratches on the silicon wafer and boosts the EL yield of the cell.