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METHOD AND APPARATUS FOR INFRARED SCANNING NEAR-FIELD OPTICAL MICROSCOPY BASED ON PHOTOTHERMAL EFFECT

机译:基于光热效应的近场光学显微镜红外扫描方法及装置

摘要

Systems and methods may be provided for measuring an infrared absorption of a sub micrometer region of a sample. An Infrared light source may illuminate a sample in a region that is interacting with the tip of a Scanning Probe Microscope (SPM), stimulating the sample in a way that produces measurable optical properties related to Infrared absorption of the sample region. A probe light source is directed at the region of the sample and SPM tip, and probe light emanating from the tip and sample region is collected. The collected light may be used to derive infrared absorption spectrum information of the sample region, possibly on a sub-micron scale.
机译:可以提供用于测量样品的亚微米区域的红外吸收的系统和方法。红外光源可以照亮与扫描探针显微镜(SPM)尖端相互作用的区域中的样品,以产生与样品区域的红外吸收相关的可测量光学特性的方式刺激样品。将探针光源对准样品和SPM尖端的区域,并收集从尖端和样品区域发出的探针光。所收集的光可以用于导出样品区域的红外吸收光谱信息,可能在亚微米尺度上。

著录项

  • 公开/公告号EP3593149A1

    专利类型

  • 公开/公告日2020-01-15

    原文格式PDF

  • 申请/专利权人 BRUKER NANO INC.;

    申请/专利号EP20180764447

  • 发明设计人 YANG HONGHUA;PRATER CRAIG;

    申请日2018-03-09

  • 分类号G01Q60;G01Q60/18;G01Q60/24;G01Q60/38;G01N21/35;G01N21/65;G01J3/44;

  • 国家 EP

  • 入库时间 2022-08-21 11:39:40

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