METAL ALKOXIDE COMPOUND, THIN-FILM-FORMING RAW MATERIAL, AND METHOD FOR PRODUCING THIN FILM

摘要

The present invention provides a metal alkoxide compound represented by the following general formula (1):(in the formula, R¹ and R² each independently represent an alkyl group having 1 to 4 carbon atoms, R³ represents an alkyl group having 2 or 3 carbon atoms, M represents a scandium atom, an yttrium atom, a lanthanum atom, a cerium atom, a praseodymium atom, a neodymium atom, a promethium atom, a samarium atom, a europium atom, a gadolinium atom, a terbium atom, a dysprosium atom, a holmium atom, an erbium atom, a thulium atom, an ytterbium atom, or a lutetium atom, and n represents the valence represented by M.)