Manufacturing method of surface acoustic wave sensor and surface acoustic wave sensor

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a surface acoustic wave sensor which minimizes propagation loss. SOLUTION: A comb-shaped electrode 2 for transmitting, receiving or reflecting an elastic surface wave, a detection region 3 into which a liquid to be measured is introduced, and a comb-shaped electrode 2 near the boundary between the comb-shaped electrode 2 and the detection region 3 A comb shape formed on the dummy electrode (that is, on the dummy electrode) and provided with a sealing dam 4 for preventing the liquid to be measured from the detection region 3 from entering the comb electrode 2 and formed under the sealing dam 4. Of the electrodes 2, the metallization ratio m, which is the ratio of the width of the electrode fingers to the sum of the width of the electrode fingers formed of the metal thin film and the width between the adjacent electrode fingers on which the metal thin film is not formed, is the sealing dam 4. The elastic surface wave sensor S is characterized by having a value such that the propagation loss y of the elastic surface wave by the sealing dam 4 is minimized with respect to the width x having in the propagation direction of the elastic surface wave. [Selection diagram] Fig. 1