RECIPE CONVERSION METHOD, RECIPE CONVERSION PROGRAM, RECIPE CONVERSION DEVICE AND SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a technology for converting a recipe conveniently to a recipe for different kind of substrate processing apparatus, when performing the same substrate processing by a different kind of substrate processing apparatus.;SOLUTION: A recipe conversion method for converting a first substrate processing recipe, indicating substrate processing procedure in a first substrate processing apparatus, into a second substrate processing recipe, indicating substrate processing procedure in a second substrate processing apparatus, includes a step of recognizing correspondence of a prescribed first value corresponding to each operation of the first substrate processing apparatus in the first substrate processing recipe, and a prescribed second value corresponding to each operation of the second substrate processing apparatus in the second substrate processing recipe, a step of extracting a first value that can be converted into the second value by applying a first transformation rule, and a step of extracting a first value that can be converted into the second value by applying a second transformation rule different from the first transformation rule.;SELECTED DRAWING: Figure 12;COPYRIGHT: (C)2020,JPO&INPIT