Semiconductor manufacturing equipment and display manufacturing equipment including semiconductor manufacturing equipment members and semiconductor manufacturing equipment members

摘要

PROBLEM TO BE SOLVED: To provide a member for a semiconductor manufacturing apparatus capable of reducing particles. SOLUTION: A base material containing an aluminum member containing an aluminum element, an alumite layer provided on the surface of the aluminum member, and a particle-resistant layer provided on the alumite layer and containing polycrystalline ceramics. Provided is a member for a semiconductor manufacturing apparatus, wherein the aluminum member has an Al purity of 99.00% or more. [Selection diagram] Fig. 2