Crystal orientation diagram generating device, charged particle beam device, crystal orientation diagram generating method and program

摘要

FIG. 3 is a diagram illustrating a crystal coordinate system used in a charged particle beam apparatus (100) for causing a charged particle beam to be incident on a surface of a sample and representing a crystal coordinate system of a crystal at a selected position on the sample surface with respect to an incident direction of the charged particle beam. (10), an orientation information acquisition unit (1) for acquiring orientation information of a crystal at a selected position with respect to an incident direction, and an incidence for acquiring information on an incident direction of a charged particle beam with respect to a sample. The direction information acquisition unit (2), the orientation information of the crystal acquired by the orientation information acquisition unit (1), and the incidence when the orientation information of the crystal acquired by the incidence direction information acquisition unit (2) is acquired. A crystal orientation diagram generation unit (3) for generating a crystal orientation diagram in the selected incident direction at the selected position based on the information on the direction and the information on the incident direction after the change. Obtain a crystal orientation view generator (10).