Crystal orientation diagram generation device, charged particle beam device, crystal orientation diagram generation method and program

摘要

A crystal orientation diagram showing a crystal coordinate system of a crystal at a selected position of the sample surface with respect to the incident direction of the charged particle beam, used in a charged particle beam device (100) for causing the charged particle beam to be incident on the surface of the sample An orientation information acquiring unit (1) for acquiring crystal orientation information at a selected position with respect to the incident direction, and an incident for acquiring information on the incident direction of the charged particle beam to the sample Incident when the crystal orientation information acquired by the direction information acquisition unit (2) and the orientation information acquisition unit (1) and the crystal orientation information acquired by the incident direction information acquisition unit (2) And a crystal orientation diagram generation unit (3) for generating a crystal orientation diagram in the incident direction after change at the selected position based on the information on the direction and the information on the incident direction after change Obtain a crystal orientation view generator (10).