The measurement system includes a controller coupled to a detector that produces a detection signal based on the reflection of the irradiation beam from the multilayer film stack. The multilayer film stack may include one or more zones having a repeating pattern composition of two or more materials. The controller models the zone as a thick film with zone thickness and effective permittivity value using an effective medium model that correlates the effective permittivity value of the zone with the effective permittivity value and volume ratio of the constituent materials. , Can generate a model of the reflection of the irradiation beam. The controller also uses the regression of the detection signal based on the effective medium model to determine the zone thickness and volume ratio values, and further the constituent materials based on the number of films, zone thickness, volume ratio, and effective permittivity values. The average thickness value of can be determined.
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