THREE-DIMENSIONAL SHAPE MEASURING SYSTEM, THREE-DIMENSIONAL SHAPE MEASURING METHOD, AND THREE-DIMENSIONAL SHAPE MEASURING PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring system, a three-dimensional shape measuring method and a three-dimensional shape measuring program with which it is possible to measure a three-dimensional shape applying a TDC method, even when there is interreflection light on an object having strong specularity.;SOLUTION: A three-dimensional shape measuring system 100 comprises: a video projection unit for sequentially projecting an encoded pattern image string consisting of multiple kinds of encoded pattern images; a fast imaging unit for sequentially imaging an object W to which the encoded pattern images are projected by the video projection unit and acquiring a captured image string consisting of a plurality of captured images; an interreflection compatible decoding unit for performing a decoding that is compatible with interreflection using the encoded pattern image string and the captured image string; and a three-dimensional shape measurement unit for associating the encoded pattern images with the captured images using the result of decoding by the interreflection compatible decoding unit and the geometrical relation of the video projection and fast imaging units and thereby measuring the three-dimensional shape of the object W.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2020,JPO&INPIT