ULTRA-HIGH-SPEED INSPECTION DEVICE USING ELECTRON AND ULTRA-HIGH-SPEED INSPECTION METHOD USING ELECTRON

摘要

To provide an ultra-high-speed inspection device using electrons and an ultra-high-speed inspection method using electrons such that the ultra-high-speed inspection device acquires electron distribution information on which a three-dimensional structure of a sample surface is reflected to inspect a pattern defect at a high speed.SOLUTION: An ultra-high-speed inspection device using electrons comprises: one or more electron detection devices 3 which detect three-dimensional angle distribution information, three-dimensional intensity distribution information, or three-dimensional energy distribution information on electrons emitted to a three-dimensional space or electrons reflected depending upon a three-dimensional structure of an object of measurement in a predetermined region when the predetermined region is irradiated with electrons; collation means which collates one or more of the three-dimensional angle distribution information, three-dimensional intensity distribution information, or three-dimensional energy distribution information on the electrons detected by the electron detection device 3 with three-dimensional reference information generated through simulation of a predetermined region of a sample; and means 29 which outputs a result of the collation by the collation means.SELECTED DRAWING: Figure 1