MOUNTING TABLE MECHANISM, PROCESSING APPARATUS, AND OPERATION METHOD OF MOUNTING TABLE MECHANISM

摘要

To provide a technique capable of suppressing displacement or breakage of a substrate due to residual charges as compared with the related art.SOLUTION: A mounting table mechanism according to one aspect of the present disclosure includes an electrostatic chuck in which a conductive film capable of electrically contacting the back surface of a substrate is formed on the front surface, a conductive member that is electrically connected to the conductive film, and is wound to the back surface of the electrostatic chuck, and a movable member electrically connected to the conductive member via a connecting member, and movable between a position connected to a ground potential and a position not connected to the ground potential.SELECTED DRAWING: Figure 2