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Device, method, and sample holder for testing photonic integrated circuits and photonic integrated circuits
Device, method, and sample holder for testing photonic integrated circuits and photonic integrated circuits
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机译:用于测试光子集成电路和光子集成电路的装置,方法和样品架
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摘要
Devices, methods, and sample holders for testing photonic integrated circuits and photonic integrated circuits. A method and apparatus for testing a photonic integrated circuit, and a corresponding sample holder and photonic integrated circuit are provided. Here, the location for the illumination light beam (15) can be selected via the scanning device (11), so that targeted coupling of the illumination light into the photonic integrated circuit (12) is possible. It is said. [Selection diagram] Fig. 1
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