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Device, method, and sample holder for testing photonic integrated circuits and photonic integrated circuits

机译:用于测试光子集成电路和光子集成电路的装置,方法和样品架

摘要

Devices, methods, and sample holders for testing photonic integrated circuits and photonic integrated circuits. A method and apparatus for testing a photonic integrated circuit, and a corresponding sample holder and photonic integrated circuit are provided. Here, the location for the illumination light beam (15) can be selected via the scanning device (11), so that targeted coupling of the illumination light into the photonic integrated circuit (12) is possible. It is said. [Selection diagram] Fig. 1
机译:用于测试光子集成电路和光子集成电路的设备,方法和样品架。提供了一种用于测试光子集成电路的方法和设备,以及相应的样品支架和光子集成电路。在此,可以通过扫描装置(11)选择照明光束(15)的位置,从而可以将照明光定向地耦合到光子集成电路(12)中。据说。 [选择图]图1

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