FLASH LAMP IRRADIATION PROCESSING DEVICE OF VUV LIGHT

摘要

To enable an arrangement with less inductance even when a plurality of capacitors is connected in parallel.SOLUTION: A lamp lighting chamber 3 and a capacitor chamber 5 are structured with an independent housing, respectively. In the container chamber 5 side of a separation wall 21, an o-ring is provided in order to prevent immersion of ozone. Therefore, a VUV light from the lamp lighting chamber 3 can be blocked with the separation wall 21, conduction of an inactivation gas for preventing ozone from generating in the lamp lighting chamber 3 is eliminated. A plurality of capacitors 31 is arranged in the capacitor chamber 5 to a lamp arrangement direction and a direction orthogonal to the direction. Thus, wirings 41 and 43 for connecting both electrodes of a lamp 11 can be shortened.SELECTED DRAWING: Figure 4