Laser system, extreme ultraviolet light generation device, and extreme ultraviolet light generation method

摘要

The laser system emits a first laser beam having a first wavelength component and a first polarization component, and a second laser beam having a first wavelength component and a second polarization component. Pulse laser system, a guide laser device that emits a third laser beam having a second wavelength component, and a first guide laser beam that has the third laser beam as a first guide laser beam having a first polarization component. A polarization conversion mechanism configured to be switchable between a state and a second state in which the third laser light is a second guide laser light having a second polarization component, and first and second laser light. A first dichroic mirror that reflects one of the first and second guide laser beams and transmits the other, and a second laser beam that reflects the first laser beam and the first guide laser beam. A polarized beam splitter that transmits the second guide laser beam. And, equipped with a.