Metal contamination prevention method and metal contamination prevention apparatus, and substrate processing method and substrate processing apparatus using them

摘要

A metal contamination preventing method to be performed prior to using a metal component coated with a passivation film formed of chromium oxide includes generating chromium nitrate by supplying a nitric acid to the passivation film covering a surface of the metal component, and reacting the chromium oxide with the nitric acid and removing chromium from the passivation film by evaporating the chromium nitrate.