POLISHING PAD LAMINATE, POLISHING PAD POSITIONING JIG, AND METHOD OF APPLYING POLISHING PAD TO POLISHING TABLE

摘要

To provide a polishing pad laminate which enables easy alignment of a through hole of a polishing pad with a sensor head installed on a polishing table.SOLUTION: A polishing pad laminate 60 includes: a polishing pad 1 having a through hole 51 formed at a position that corresponds to a position of a sensor head 31 disposed in a polishing table 3; and a peeling sheet 62 covering an adhesion surface 1b of the polishing pad 1. The peeling sheet 62 is divided into at least a first peeling sheet 62A and a second peeling sheet 62B. The first peeling sheet 62A has a surface area smaller than that of the second peeling sheet 62B.SELECTED DRAWING: Figure 5