首页>
外国专利>
Evaporation plate for depositing deposition material on substrate, evaporation apparatus, and method of depositing deposition material on substrate
Evaporation plate for depositing deposition material on substrate, evaporation apparatus, and method of depositing deposition material on substrate
展开▼
机译:用于在基板上沉积沉积材料的蒸发板,蒸发设备以及在基板上沉积沉积材料的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present application discloses an evaporation plate for depositing a deposition material on a substrate. The evaporation plate has a first side and a second side opposite to the first side. The evaporation plate includes a main body plate; a first cooling layer on the main body plate and on the first side of the evaporation plate; and a first heating layer on a side of the first cooling layer distal to the main body plate. The first cooling layer is configured to cool the first heating layer on the first side of the evaporation plate. The first heating layer is configured to heat a material deposited on the first side of the evaporation plate.
展开▼