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Mechanisms for forming metal-insulator-metal (MIM) capacitor structure
Mechanisms for forming metal-insulator-metal (MIM) capacitor structure
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机译:形成金属-绝缘体-金属(MIM)电容器结构的机制
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摘要
A metal-insulator-metal (MIM) capacitor structure is provided. The MIM capacitor structure includes a first conductive layer formed over a substrate, and the first conductive layer includes a first portion and a second portion. The MIM capacitor structure also includes an insulating layer formed over the first portion of the first conductive layer and a second conductive layer formed over the first conductive layer. The second conductive layer includes a first portion and a second portion, the first portion of the second conductive layer is in direct contact with the insulating layer, and the second portion of the second conductive layer is in direct contact with the second portion of the first conductive layer.
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