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Functionally graded material by in-situ gradient alloy sputter deposition management
Functionally graded material by in-situ gradient alloy sputter deposition management
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机译:通过原位梯度合金溅射沉积管理功能分级材料
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摘要
Embodiments relate to a sputter chamber with a configurable surface in communication with a target material. A control system is in communication with the chamber and functions to prepare an alloy film by changing a composition of the configurable surface. As ingress gas is introduced to the chamber to interact with the changed composition, the interaction causes a reaction that produces an alloy film.
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