Intermediate connector, semiconductor device including intermediate connector, and method of manufacturing intermediate connector

摘要

An intermediate connector includes a power source bus bar as an elongated thin plate to be connected to each power source pad of a semiconductor integrated circuit, a ground bus bar as an elongated thin plate to be connected to each ground pad of the semiconductor integrated circuit, a thin film insulator layer formed between the power source bus bar and the ground bus bar, and a conductive path portion as an elongated thin plate including a plurality of conductive paths to be connected to each signal pad of the semiconductor integrated circuit. The power source bus bar, the ground bus bar, and the conductive path portion are arranged in parallel correspondingly to a parallel arrangement of a power source pad row, a ground pad row, and a signal pad row of the semiconductor integrated circuit.