Nanoimprint template, a method of making the same and applications thereof

摘要

A nanoimprint template is provided, including a main template, a plurality of photoresist micro-structures arranged on the main template, and a fluororubber polymer layer coated on an outer layer of the photoresist micro-structures. The fluororubber polymer layer has a bonding function with the main template, so as to fixedly connect to the surface of the main template. The nanoimprint template can not only protect the photoresist microstructure therein, but also prevent the nanoimprint template from being deformed during operating, thereby improving the process quality. Moreover, the surface oil resistance and corrosion resistance of the nanoimprint template is improved, so that the surface has lower surface energy, which can effectively improve the degumming problem during operating. A manufacturing method of the nanoimprint template and the application thereof in manufacturing a microstructure substrate are also provided, the microstructure size and shape of the formed microstructure substrate can be ensured.