HYBRID DESIGN LAYOUT TO IDENTIFY OPTICAL PROXIMITY CORRECTION-RELATED SYSTEMATIC DEFECTS
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机译:混合设计布局以识别与光学邻近度相关的系统缺陷
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摘要
Defects can be identified using a hybrid design layout that includes a printable layer and a non-printed layer. The hybrid design layout can be generated by incorporating at least a portion of the non-printable layer layout with the printable layer layout. Defects can be identified using optical or scanning electron beam images.
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