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METHOD FOR MACHINING SPUTTERING TARGET, APPARATUS FOR MACHINING SPUTTERING TARGET, SPUTTERING TARGET, AND METHOD FOR PRODUCING SPUTTERING TARGET PRODUCT
METHOD FOR MACHINING SPUTTERING TARGET, APPARATUS FOR MACHINING SPUTTERING TARGET, SPUTTERING TARGET, AND METHOD FOR PRODUCING SPUTTERING TARGET PRODUCT
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机译:溅射靶材的加工方法,溅射靶材的加工装置,溅射靶材以及溅射靶材的制造方法
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摘要
A method for machining a sputtering target that includes a sputtering surface, an opposing surface opposite to the sputtering surface, and an outer peripheral surface being between the sputtering surface and the opposing surface comprises the steps of: fixing the sputtering target on a fixing table by mounting the sputtering surface or the opposing surface of the sputtering target on the fixing table; and cutting the outer peripheral surface of the sputtering target by a cutting tool while rotating the cutting tool along a circumferential direction of the outer peripheral surface of the sputtering target.
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