首页> 外国专利> METHOD FOR POLISHING GLASS SUBSTRATE, METHOD FOR MANUFACTURING GLASS SUBSTRATE, METHOD FOR MANUFACTURING MAGNETIC-DISK GLASS SUBSTRATE, METHOD FOR MANUFACTURING MAGNETIC DISK, POLISHING LIQUID, AND METHOD FOR REDUCING CERIUM OXIDE

METHOD FOR POLISHING GLASS SUBSTRATE, METHOD FOR MANUFACTURING GLASS SUBSTRATE, METHOD FOR MANUFACTURING MAGNETIC-DISK GLASS SUBSTRATE, METHOD FOR MANUFACTURING MAGNETIC DISK, POLISHING LIQUID, AND METHOD FOR REDUCING CERIUM OXIDE

机译:玻璃基板的抛光方法,玻璃基板的制造方法,磁碟玻璃基板的制造方法,磁碟的制造方法,抛光液以及氧化铈的还原方法

摘要

A method for polishing a glass substrate, by which a polishing speed that is higher than a conventional polishing speed can be maintained for a long period of time in processing for polishing a glass substrate using cerium oxide as polishing abrasive particles is provided. A polishing liquid containing cerium oxide as polishing abrasive particles is supplied to a polishing surface of a glass substrate, and the glass substrate is subjected to polishing processing. This polishing liquid contains the cerium oxide as polishing abrasive particles and a substance that reduces cerium oxide in response to light irradiation. Also, processing for irradiating the polishing liquid with light is performed when polishing processing is performed.
机译:本发明提供一种玻璃基板的研磨方法,在使用氧化铈作为研磨用磨粒的玻璃基板的研磨处理中,可以长期维持比以往的研磨速度高的研磨速度。将包含氧化铈作为抛光磨粒的抛光液供应至玻璃基板的抛光表面,并对玻璃基板进行抛光处理。该抛光液包含作为抛光研磨剂颗粒的氧化铈和响应于光照射而还原氧化铈的物质。此外,当执行抛光处理时,执行用于用光照射抛光液的处理。

著录项

  • 公开/公告号US2020032104A1

    专利类型

  • 公开/公告日2020-01-30

    原文格式PDF

  • 申请/专利权人 HOYA CORPORATION;

    申请/专利号US201716337310

  • 发明设计人 HIROKI NAKAGAWA;KASHIO NAKAYAMA;

    申请日2017-11-24

  • 分类号C09G1/02;G11B5/84;C23C14/34;C23C14/02;C09K3/14;B24B37/04;

  • 国家 US

  • 入库时间 2022-08-21 11:20:36

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号