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PIEZORESISTIVE SENSOR WITH SPRING FLEXURES FOR STRESS ISOLATION
PIEZORESISTIVE SENSOR WITH SPRING FLEXURES FOR STRESS ISOLATION
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机译:带弹簧挠曲的压敏传感器用于应力隔离
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摘要
A MEMS device includes a backing wafer with a support portion and central back plate connected to the support portion with spring flexures, a diaphragm wafer with a support portions and a sensing portion connected to the support portion with spring flexures, a passivation layer on the diaphragm, and a topping wafer. The device allows for stress isolation of a diaphragm in a piezoresistive device without a large MEMS die.
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