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TCAD design template for fast prototyping of 2D and 3D CMOS image sensors
TCAD design template for fast prototyping of 2D and 3D CMOS image sensors
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机译:TCAD设计模板,用于2D和3D CMOS图像传感器的快速原型制作
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摘要
An improved TCAD software tool includes a structure generator for generating a core single-pixel three-dimensional (3D) model including only front-end details of a single CIS pixel, a prototyping tool for generating modified CIS prototypes by automatically combining the core single-pixel 3D model with features and configurations included in selected modular templates, and a separate mesh generator for generating optical simulation models by generating optical meshes based on each CIS prototype's selected configuration. The modular templates include pre-configured optically-relevant (e.g., micro-lens and anti-reflection) structures, alternative (e.g., front-side illuminated or back-side illuminated, two-dimensional or 3D) pixel configurations, alternative array configurations, and alternative color filter patterns. Optical simulation results generated for the various prototypes displayed for analysis using a movie process and using curves having colors that correspond to associated simulated visible light frequencies.
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