Structure of trench-vertical double diffused MOS transistor and method of forming the same

摘要

A structure of trench VDMOS transistor comprises an n− epi-layer/ n+ substrate having trench gates formed therein, which have a trench oxide layer conformally formed and filled with a first poly-Si layer. A plurality of MOS structure formed on the mesas. Doubled diffused source regions are formed asides the MOS structure. An inter-metal dielectric layer is formed on the resulted surfaces. An interconnecting metal layer patterned as two is formed on inter-metal dielectric layer. The one is for source regions and the first poly-Si layer connection by source contact plugs and the other for the gate connection by gate contact plugs. In the other embodiment, the trenches are filled with a stack layer of a first oxide layer/a first poly-Si layer. The MOS gates with their second poly-Si layer in a form of rows are formed on the first oxide layer and the mesas. An inter-metal dielectric layer is formed on the resulted surfaces. An interconnecting metal layer is formed on the inter-metal dielectric layer and through the source contact plugs connecting the source regions and the first poly-Si layer. The drain electrode is formed on the rear surface of the n+ substrate for both embodiments.