GAS SENSOR, MULTISENSOR RANGE OF CHEMORESISTIVE TYPE BASED ON THE OXIDIZED TWO-DIMENSIONAL TITANIUM CARBIDE (MAXEN) AND METHOD FOR PRODUCING IT

摘要

The invention relates to the field of sensor technology and nanotechnology, in particular to the development of gas sensors of the chemoresistive type used for gas detection. A method of manufacturing a gas sensor includes the synthesis of structures of two-dimensional titanium carbide TiCT (maxen), where T = O, OH, F, and their deposition on a dielectric substrate equipped with coplanar measuring electrodes, followed by annealing at a temperature of 350 ° C to oxidize maxenes with the purpose of forming a non-stoichiometric surface layer of titanium dioxide. The result is the manufacture of a new highly sensitive gas sensor of a chemoresistive type. In the case of equipping the sensor substrate with a set of coplanar electrodes in an amount of more than three, it is possible to form a multisensor array of a chemoresistive type, the vector signal of which, after processing by pattern recognition methods, allows selective discrimination of test gas mixtures.