SINGLE-ELECTRODE GAS SENSOR BASED ON OXIDIZED TITANIUM, METHOD OF ITS MANUFACTURING, SENSOR DEVICE AND MULTI-TOUCH RANGE ON ITS BASIS

摘要

The group of inventions relates to the field of gas analysis, namely to sensor devices for analyzing gases and gas mixtures and methods for their manufacture. A method is described for manufacturing a single-electrode gas sensor based on a titanium wire, which is oxidized by anodizing in an electrochemical cell to form a mesoporous oxide layer consisting of radially oriented ordered TiO nanotubes with a wall thickness of up to 20 nm and an inner diameter of up to 150 nm. As a result of the method, a single-electrode gas sensor is obtained in which a titanium wire with a diameter of 50-250 μm is used as a heating and measuring electrodes, and the mesoporous oxide layer consisting of TiO nanotubes serves as a catalytic layer. This single-electrode sensor has a response to organic vapors in the form of a change in resistance when transmitting an operating current in the range of 80-200 mA. For use in sensor devices, a single-electrode gas sensor is either connected directly to a current source, or connected to a voltage source through a divider, or included in a bridge circuit, where either a passive resistor having a resistance similar in value to the resistance of an oxidized titanium wire serves as a compensating element, or another one-electrode sensor based on oxidized titanium wire with a different diameter of titanium metal. In order to selectively analyze gases on the basis of a set of single-electrode gas sensors, the number of which is no less than three, a multi-sensor line is made, the vector signal of which makes it possible to distinguish between the effects of the same type of alcohol vapor, for example, isopropanol and ethanol. The technical result of the claimed group of inventions is to create a new type of single-electrode gas sensor manufactured at low cost, sensor devices based on such a sensor and multisensor rulers.