ALIGNMENT METHOD FOR A BEAM-DIRECTING UNIT OF AN INTERFEROMETRIC MEASURING DEVICE, AND MEASURING DEVICE FOR CARRYING OUT AN INTERFEROMETRIC MEASUREMENT BY MEANS OF LASER RADIATION

摘要

The invention relates to an alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of a object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by means of a plurality of spatially resolved images. The invention also relates to a measuring device for carrying out an interferometric measurement by means of laser radiation, having a control unit which is designed to align a beam-directing unit of the measurement device.