Calibration method for a beam straightening unit of an interferometric measuring device and measuring device for performing an interferometric measurement by means of laser radiation

摘要

The invention relates to an adjustment method for a beam directing unit of an interferometric measuring device for directing a laser beam of a laser beam source to a plurality of measuring points of a measuring object, wherein a three-dimensional model of a measuring surface of a measuring object is created by means of a plurality of spatially resolved images. The invention further relates to a measuring device for performing an interferometric measurement by means of laser radiation, with a control unit, which is designed for balancing a beam straightening unit of the measuring device.