Alignment method for beam orientation unit of interferometric device and measuring apparatus for performing interferometry using laser irradiation

摘要

The present invention relates to an alignment method for a beam alignment unit of an interferometric measuring apparatus for directing a laser beam of a laser light source to a plurality of measurement points of a measurement object; In the alignment method, a three-dimensional model of the measuring surface of the object to be measured is produced by a plurality of spatially resolved images.Further, the present invention relates to a measuring apparatus for performing an interferometric measurement by laser irradiation, and the measuring apparatus has a control unit formed to perform alignment of a beam orientation unit of the measuring apparatus.