TARGET IMAGE-CAPTURE DEVICE AND EXTREME-ULTRAVIOLET-LIGHT GENERATION DEVICE

摘要

A target image-capture device according to an aspect of the present invention comprises: a delay circuit that receives a timing signal from outside and outputs a first trigger signal at a time delayed by a first delay time from the reception of the timing signal; an illumination light source that emits light on the basis of the first trigger signal; an image-capture unit with an optical amplifier, which is arranged so as to capture an image of the shadow of a target being observed by use of the emission of light from the illumination light source onto the target; a processing unit for performing image processing that includes a process for measuring a background luminance from the image captured by the image-capture unit; and a control unit that adjusts the gain of the optical amplifier on the basis of the background luminance.