首页> 外国专利> METHOD OF COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS, LAYER STACK, AND DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS

METHOD OF COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS, LAYER STACK, AND DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS

机译:用层堆叠涂覆柔性基板的方法,层堆叠以及用于用层堆叠涂覆柔性基板的沉积装置

摘要

A method of coating a flexible substrate (10) with a stack of layers is described. The method includes providing an initial deposition on the flexible substrate by depositing a first portion (B1) of a second material (B) while guiding the flexible substrate in a forward direction (FD). Additionally, the method includes providing one or more subsequent depositions including depositing a second portion (B2) of the second material (B) and depositing a first portion (A1) of a first material (A) while guiding the flexible substrate in a backward direction (BD). Further, the method includes depositing a second portion (A2) of the first material (A) and depositing a first portion (B1) of the second material (B) while guiding the flexible substrate in the forward direction (FD). Moreover, a layer stack and a deposition apparatus for coating a flexible substrate with a stack of layers are described.
机译:描述了一种用多层堆叠涂覆柔性基板(10)的方法。该方法包括通过在沿向前方向(FD)引导柔性基板的同时沉积第二材料(B)的第一部分(B1)来在柔性基板上提供初始沉积。另外,该方法包括提供一个或多个随后的沉积,包括沉积第二材料(B)的第二部分(B2)和沉积第一材料(A)的第一部分(A1),同时沿向后的方向引导柔性基板(BD)。此外,该方法包括在沿向前方向(FD)引导柔性基板的同时沉积第一材料(A)的第二部分(A2)和沉积第二材料(B)的第一部分(B1)。此外,描述了用于利用层的堆叠涂覆柔性基板的层堆叠和沉积设备。

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