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METHOD OF COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS, LAYER STACK, AND DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS
METHOD OF COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS, LAYER STACK, AND DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE WITH A STACK OF LAYERS
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机译:用层堆叠涂覆柔性基板的方法,层堆叠以及用于用层堆叠涂覆柔性基板的沉积装置
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摘要
A method of coating a flexible substrate (10) with a stack of layers is described. The method includes providing an initial deposition on the flexible substrate by depositing a first portion (B1) of a second material (B) while guiding the flexible substrate in a forward direction (FD). Additionally, the method includes providing one or more subsequent depositions including depositing a second portion (B2) of the second material (B) and depositing a first portion (A1) of a first material (A) while guiding the flexible substrate in a backward direction (BD). Further, the method includes depositing a second portion (A2) of the first material (A) and depositing a first portion (B1) of the second material (B) while guiding the flexible substrate in the forward direction (FD). Moreover, a layer stack and a deposition apparatus for coating a flexible substrate with a stack of layers are described.
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