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PREPARATION METHOD OF SPLICING-TYPE IMPRINTING TEMPLATE AND MOTHER TEMPLATE
PREPARATION METHOD OF SPLICING-TYPE IMPRINTING TEMPLATE AND MOTHER TEMPLATE
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机译:拼接型浸渍模板和母模板的制备方法
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摘要
A preparation method of a splicing-type imprinting template. The splicing-type imprinting template comprises: a first splicing region (6) and a second splicing region (7) adjacent to each other. The preparation method comprises: forming a first splicing imprinting pattern (8) in the first splicing region (6) on a base substrate (5); forming a sacrificial layer (9) on a side surface, away from the base substrate (5), of the first splicing imprinting pattern (8); forming second template glue (10) in the second splicing region (7) on the base substrate (5); patterning the second template glue (10) located in the second splicing region (7) by using a predetermined mother template (3a, 3b); fixing and demolding the second template glue (10); and removing the sacrificial layer (9) through a specific demolding process. Further provided are a splicing-type imprinting template and a mother template (3a, 3b).
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