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PREPARATION METHOD OF SPLICING-TYPE IMPRINTING TEMPLATE AND MOTHER TEMPLATE

机译:拼接型浸渍模板和母模板的制备方法

摘要

A preparation method of a splicing-type imprinting template. The splicing-type imprinting template comprises: a first splicing region (6) and a second splicing region (7) adjacent to each other. The preparation method comprises: forming a first splicing imprinting pattern (8) in the first splicing region (6) on a base substrate (5); forming a sacrificial layer (9) on a side surface, away from the base substrate (5), of the first splicing imprinting pattern (8); forming second template glue (10) in the second splicing region (7) on the base substrate (5); patterning the second template glue (10) located in the second splicing region (7) by using a predetermined mother template (3a, 3b); fixing and demolding the second template glue (10); and removing the sacrificial layer (9) through a specific demolding process. Further provided are a splicing-type imprinting template and a mother template (3a, 3b).
机译:拼接型压印模板的制备方法。拼接型压印模板包括:彼此相邻的第一拼接区(6)和第二拼接区(7)。该制备方法包括:在基础基板(5)上的第一拼接区域(6)中形成第一拼接压印图案(8);在所述第一拼接压印图案(8)的远离所述基底(5)的侧面上形成牺牲层(9)。在基础基板(5)上的第二拼接区域(7)中形成第二模板胶(10)。通过使用预定的母模板(3a,3b)对位于第二拼接区域(7)中的第二模板胶(10)进行构图;固定并脱模第二模板胶(10);通过特定的脱模工艺去除牺牲层(9)。还提供了拼接型压印模板和母模板(3a,3b)。

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