METHOD FOR MANUFACTURING AN INTEGRATED MEMS TRANSDUCER DEVICE AND INTEGRATED MEMS TRANSDUCER DEVICE

摘要

A method for manufacturing an integrated micro-electro-mechanical systems, MEMS, transducer device, comprises providing a substrate body (1) with a surface, depositing an etch-stop layer (8), ESL, on the surface, depositing a sacrificial layer (3) on the ESL (8), depositing a diaphragm layer (6) on the sacrificial layer (3), and removing the sacrificial layer (3). Depositing the sacrificial layer (3) comprises depositing a first sub-layer (4) of a first material and depositing a second sub-layer (5) of a second material, wherein the first and the second material are different materials.