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METHOD FOR MANUFACTURING A DETECTION STRUCTURE WITH AN OPTIMISED ABSORPTION RATE, AND SAID STRUCTURE

机译:具有最佳吸收率的探测结构的制造方法和所述结构

摘要

The invention concerns a method for forming a detection structure (10) for detecting electromagnetic radiation comprising an MOS transistor (100) as a transducer. The method is based on the use of lateral extension elements (134, 135, 136) as a doping mask for the semiconductor layer (113P) of the transistor and an etching mask for the same semiconductor layer 113P), in order to provide contact portions (111A, 112A) of a drain and a source of the transistor (100). The invention further concerns a detection structure (10) capable of being obtained by such a method.
机译:本发明涉及一种用于形成用于检测电磁辐射的检测结构(10)的方法,该方法包括MOS晶体管(100)作为换能器。该方法基于使用横向延伸元件(134、135、136)作为用于晶体管的半导体层(113P)的掺杂掩模和用于同一半导体层(113P)的蚀刻掩模,以便提供接触部分。晶体管(100)的漏极和源极的漏极(111A,112A)。本发明还涉及一种能够通过这种方法获得的检测结构(10)。

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