WAFER TRANSPORT DEVICE, VAPOR DEPOSITION DEVICE, WAFER TRANSPORT METHOD, AND METHOD FOR MANUFACTURING EPITAXIAL SILICON WAFER

摘要

This wafer transport device is provided with a transfer means and a mounting means for mounting a silicon wafer transferred by the transfer means onto a susceptor (3). The mounting means is provided with a plurality of lift pins (71, 72, 73) and a relative moving means for causing the plurality of lift pins (71, 72, 73) and the susceptor (3) to be moved relative to each other. At least one of the transfer means and the mounting means is configured such that, when the silicon wafer is supported by the plurality of lift pins (71, 72, 73), a specific lift pin (71) makes an initial contact with a lower surface of the silicon wafer.