Manufacturing method of MEMS probe tip by ultra high frequency laser and MEMS probe tip designed by same method

摘要

The present disclosure relates to a manufacturing method of a probe which can process a shape of a probe tip of a fine size in three dimensions, can process a plurality of probe tips at the same time, and can perform reprocess even when a probe tip is worn. More specifically, provided is the manufacturing method of a MEMS probe tip using an ultrahigh frequency laser, which comprises: a first step of measuring coordinates of probe pins on an upper surface of a probe head where a plurality of probe pins are placed through a guide hole; a second step of measuring the height of the probe pins; and a third step of processing a shape of a probe tip positioned on one side portion of the probe pin by a laser.