Manufacturing method of MEMS probe tip by ultra high frequency laser and MEMS probe tip designed by same method

摘要

The disclosed content relates to a method of manufacturing a probe capable of processing a shape of a probe tip having a fine size in three dimensions, processing a plurality of probe tips at the same time, and reprocessing even when the probe tip is worn. More specifically, in a method of manufacturing a MEMS probe tip, a first step of measuring coordinates of the probe pins on an upper surface of a probe head in which a plurality of probe pins are disposed through a guide hole, and a first step of measuring the height of the probe pins Step 2 presents a method of manufacturing a MEMS probe tip using a microwave laser including a third step of processing a shape of a probe tip located at one side of the probe pin by a laser.