PVD APPARATUS AND METHOD FOR CONTROLLING COATING LAYER IN PVD PLATING PROCESSS

摘要

The present invention provides a plating layer control device in a PVD plating process that forms a plating layer by physical vapor deposition (PVD) of a steel sheet with metal vapor. The plating layer control apparatus includes a crucible to which a molten material is introduced; An electromagnetic induction coil disposed around the outer side of the crucible to heat the molten material introduced into the crucible and form a molten metal to generate metal vapor from the molten metal; A power supply unit that supplies current to the electromagnetic induction coil; And a control unit that measures the impedance of the electromagnetic induction coil and controls the current supplied to the electromagnetic induction coil so that the impedance is kept constant according to the dissolved material input to the crucible at a constant supply speed.