Thin film manufacturing device, and thin film manufacturing device using neural network

摘要

A thin film manufacturing apparatus capable of forming a thin film with high homogeneity is provided. A thin film manufacturing apparatus capable of controlling various setting conditions during thin film formation is provided. It is a thin film manufacturing apparatus having a processing chamber, a gas supply means, an exhaust means, a power supply means, an operation unit, and a control device, the gas supply means supplies gas into the processing chamber, and the exhaust means adjusts the pressure in the processing chamber, The power supply means applies a voltage between electrodes provided in the processing chamber, and the operation unit has a function of detecting and inferring abnormal conditions using a neural network during thin film formation, and the control device responds to the results of detection and inference during thin film formation. Controls various setting conditions accordingly.