An improved solid state laser is described that generates light of less than 200 nm. These lasers generate less than 200 nm of light using a fundamental wavelength between about 1030 nm and about 1065 nm. The final frequency conversion stage of the laser combines light at a wavelength of approximately 1109 nm with light at a wavelength of approximately 234 nm to produce a wavelength of 200 nm or less. By properly selecting the nonlinear medium, such mixing can be achieved by almost non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.
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