Picosecond laser system with a wavelength of 193nm based on a solid-state Nd:YAG laser, parametric oscillator, and ArF amplifier

摘要

Powerful picosecond UV pulses at a wavelength of 193nm are produced using a Nd:YAG laser radiating at a wavelength of 193nm with subsequent nonlinear transformations of the radiation and amplification in an excimer gain medium to an energy of 10 mJ.