A plasma source assembly, a gas distribution assembly including a plasma source assembly, and a method of generating a plasma are described. Plasma source assemblies include a power supply electrode having a ground electrode adjacent a first side and a dielectric adjacent a second side. A first microwave generator is electrically coupled to a first end of the power supply electrode through a first feed, and a second microwave generator is electrically coupled to a second end of the power supply electrode through a second feed.
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