MANUFACTURING METHOD OF ZINC OXIDE NANO ROD ARRAYS AND NANO ROD ARRAYS MADE BY THE SAME AND SEMICONDUCTOR DEVICE USING THE SAME

摘要

The present invention relates to a method for producing a zinc oxide nanorod array that grows in a predetermined pattern in a selective region of a nitride semiconductor, and to a zinc oxide nanorod array produced thereby. Zinc oxide nanorod array manufacturing method according to the present invention comprises preparing a growth substrate having a first surface and a second surface; Growing a nitride semiconductor layer on the first surface of the growth substrate; Disposing a support substrate on the nitride semiconductor layer; Forming a laser control pattern on a second surface of the growth substrate; The method may include removing the growth substrate from the nitride semiconductor layer by irradiating a laser from a second surface of the growth substrate having the laser blocking pattern.