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MANUFACTURING METHOD OF ZINC OXIDE NANOROD ARRAYS AND NANOROD ARRAYS MADE BY THE SAME AND SEMICONDUCTOR DEVICE USING THE SAME
MANUFACTURING METHOD OF ZINC OXIDE NANOROD ARRAYS AND NANOROD ARRAYS MADE BY THE SAME AND SEMICONDUCTOR DEVICE USING THE SAME
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机译:氧化锌纳米晶阵列的制造方法及由其制造的纳米晶阵列和半导体器件
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摘要
Disclosed are a method of manufacturing zinc oxide nanorod arrays grown in a certain pattern in a predetermined region of a nitride semiconductor, and zinc oxide nanorod arrays manufactured by the same. The method includes: preparing a growth substrate having a first surface and a second surface; growing a nitride semiconductor layer on the first surface of the growth substrate; placing a support substrate on the nitride semiconductor layer; forming a mask pattern on the second surface of the growth substrate; and removing the growth substrate from the nitride semiconductor layer by providing a laser beam through the second surface of the growth substrate having the mask pattern.
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